Simulation of ion beam sputtering with SDTrimSP, TRIDYN and SRIM

By H. Hofsäss, Kun Zhang, A. Mutzke. 2014

187 citations recorded by the source corpus.

Subfields: Computational Mechanics, Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/0c52914c9f14c17e63c5f9e668c21d5c46394a35