Enhancing aspect profile of half-pitch 32 nm and 22 nm lithography with plasmonic cavity lens

By Ping Gao, Na Yao, Changtao Wang, Zeyu Zhao, Yunfei Luo, Yanqin Wang, Guohan Gao, Kaipeng Liu, Chengwei Zhao, Xiangang Luo. 2015

142 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/f161f384cbb8be0f1c4638303ba5f685891a93dd