Carrier mobilities and process stability of strained Si n- and p-MOSFETs on SiGe virtual substrates

By M. Currie, C. Leitz, T. Langdo, G. Taraschi, E. Fitzgerald, D. Antoniadis. 2001

247 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/f102018610888cfd9f22cf730255deb5546b8bef