Growth, structure, and tribological behavior of atomic layer-deposited tungsten disulphide solid lubricant coatings with applications to MEMS

By R. K. Grubbs, Somuri V. Prasad, M. Dugger, Thomas W. Scharf, R. Goeke, P. Kotula. 2006

191 citations recorded by the source corpus.

Subfields: Materials Chemistry, Mechanical Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/f03925d42f7ae4adfc1f13cec65ef696dcb4c78f