Comparative investigation of hydrogen bonding in silicon based PECVD grown dielectrics for optical waveguides

By F. Ay, A. Aydinli. 2004

279 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/ef00bfa9f1954ea6299ac57853cb25e7b10c7bac