Mechanical deformation in silicon by micro-indentation

By J. Bradby, J. Williams, J. Wong-Leung, M. Swain, P. Munroe. 2001

247 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/eee130c33f6843696e9f365e26b6dc3424fadbbd