Deposition of aluminum-doped zinc oxide films by RF magnetron sputtering and study of their structural, electrical and optical properties

By S. Jeong, J. W. Lee, S.-B. Lee, J. Boo. 2003

161 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/ee4af4345956c7bde990d27ae4473b8f11031db7