Low temperature wafer anodic bonding

By Jun Wei, H. Xie, M. L. Nai, C. Wong, L. Lee. 2003

155 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/ee489d4b89d8e7255171c2c21963ea10b6ac159a