Synthesis of c-axis oriented AlN thin films on different substrates: A review

By G. F. Iriarte, J. G. Rodríguez, F. Calle. 2010

162 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Condensed Matter Physics, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/ee058a85f86de916eb9d84b09956e18500706937