Influence of deposition temperature on the crystallinity of Al-doped ZnO thin films at glass substrates prepared by RF magnetron sputtering method

By Zhiyun Zhang, C. Bao, W. Yao, Shengqiang Ma, Lili Zhang, Shuzeng Hou. 2011

142 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/ed925a8263937584e79c41730b35cd1411783cf7