Sub-10-nm nanolithography with a scanning helium beam

By V. Sidorkin, E. Veldhoven, E. V. D. Drift, P. Alkemade, H. Salemink, D. Maas. 2009

139 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Computational Mechanics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/ed0ecefaf77b3a8d96ab59bf457b02264999f708