Impact of mechanical stress on ferroelectricity in (Hf0.5Zr0.5)O2 thin films

By T. Shiraishi, Kiliha Katayama, T. Yokouchi, Takao Shimizu, T. Oikawa, O. Sakata, H. Uchida, Y. Imai, T. Kiguchi, T. Konno and 1 more. 2016

227 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/eced716dda5cbc0672d5eb6909543873448d5de9