Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers

By E. Langereis, M. Creatore, S. Heil, M. Sanden, W. Kessels. 2006

266 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/ec22791ef07419d1070487a80804721bdea9bb3a