Static pull-in analysis of electrostatically actuated microbeams using homotopy perturbation method

By M. Mojahedi, M M Zand, Mohammad Taghi Ahmadian. 2010

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Abstract In this study, static pull-in instability of electrostatically-actuated microbridges and microcantilevers is investigated considering different nonlinear effects. Galerkin’s decomposition method is utilized to convert the nonlinear differential equations of motion to nonlinear integro-algebraic equations. Afterward, analytic solutions to static deflections of the microbeams are obtained using the homotopy perturbation method. Results are in excellent agreement with those presented in the literature.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/ebad3ea7da67e05bf7275e01d9901498e5009584