Surface activation of thin silicon oxides by wet cleaning and silanization

By Yu Han, D. Mayer, A. Offenhäusser, S. Ingebrandt. 2006

146 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Bioengineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/eab73a111441e8e63fd493403ed9392b628881e0