Nanostructuring lithium niobate substrates by focused ion beam milling

By F. Lacour, N. Courjal, Maria-Pilar Bernal, A. Sabac, C. Bainier, M. Spajer. 2005

141 citations recorded by the source corpus.

Abstract We report on two novel ways for patterning lithium niobate (LN) at submicronic scale by means of focused ion beam (FIB) bombardment. The first method consists of direct FIB milling on LiNbO3 and the second one is a combination of FIB milling on a deposited metallic layer and subsequent RIE (Reactive Ion Etching) etching. FIB images show in both cases homogeneous structures with well reproduced periodicity. These methods open the way to the fabrication of photonic crystals on LiNbO3 substrates.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/e9b844fd54ee75d7e72e3180b8fd5044b5c3b0fb

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Citations in the corpus

• Advances in lithium niobate photonics: development status and perspectives (2022, methodology): “FIB itself is a pure mechanical milling process, which either can be used along(208,209,211) or together with other dry etching methods for layout patterning.(208,210) For prototype validation, FIB is a good choice.”