Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals

By T. Kondo, S. Matsuo, Saulius Juodkazis, Hiroaki Misawa. 2001

292 citations recorded by the source corpus.

A simple optical interference method to fabricate microperiodic structures was demonstrated. Femtosecond laser pulse was split by a diffractive beam splitter and overlapped with two lenses. Temporal overlap of the split femtosecond pulses, which requires 10 μm order accuracy in optical path lengths, was automatically achieved by this optical setup. One-, two-, and three-dimensional periodic microstructures with micrometer-order periods were fabricated using this method.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Computational Mechanics

View Paper: https://www.semanticscholar.org/paper/e93fae0347957e3348262675039064ce14a4b022

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Citations in the corpus

• A review of ultrafast laser materials micromachining (2013, background): “From multiple-beam interference [57–59] to micro-lens array [60–62], previous studies have demonstrated many approaches to create multiple beams to improve the throughput of the ultrafast laser microfabrication.”