Morphological properties of AlN piezoelectric thin films deposited by DC reactive magnetron sputtering

By Xiao-hong Xu, Hai-Shun Wu, Congjie Zhang, Zhihao Jin. 2001

237 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Condensed Matter Physics, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/e8efc0ae84fcdf8249d1eb1b85fbc92acd0bfccb