Room-temperature deposition of transparent conducting Al-doped ZnO films by RF magnetron sputtering method

By Weifeng Yang, Zhuguang Liu, D. Peng, Feng Zhang, Huolin Huang, Yannan Xie, Z. Wu. 2009

206 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/e89c262dbab6320d559cb9d1f8958599b0252919