Analysis and mitigation of interface losses in trenched superconducting coplanar waveguide resonators
By G. Calusine, A. Melville, W. Woods, R. Das, C. Stull, V. Bolkhovsky, D. Braje, D. Hover, David K. Kim, Xhovalin Miloshi and 5 more. 2017
141 citations recorded by the source corpus.
Improving the performance of superconducting qubits and resonators generally results from a combination of materials and fabrication process improvements and design modifications that reduce device sensitivity to residual losses. One instance of this approach is to use trenching into the device substrate in combination with superconductors and dielectrics with low intrinsic losses to improve quality factors and coherence times. Here we demonstrate titanium nitride coplanar waveguide resonators with mean quality factors exceeding two million and controlled trenching reaching 2.2 $\mu$m into the silicon substrate. Additionally, we measure sets of resonators with a range of sizes and trench depths and compare these results with finite-element simulations to demonstrate quantitative agreement with a model of interface dielectric loss. We then apply this analysis to determine the extent to which trenching can improve resonator performance.
Subfields: Astronomy and Astrophysics, Condensed Matter Physics, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/e7ef3f5ff13f608077bae4f2fb1bdb415f8da0fa
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Citations in the corpus
- Materials challenges and opportunities for quantum computing hardware (2021, unknown): “…focused on systematically varying the qubit geometry to change the degreeofoverlap betweentheelectromagnetic mode and the interfaces or surfaces of the device ( 60 , 94 , 97 – 101 ) and preparing surfaces to reduce lossy oxides before growth or deposition of the superconducting metal ( 97 , 102 ).”
- Circuit quantum electrodynamics (2020, unknown): “Internal quality factors over 106 can be achieved by careful fabrication minimizing the occurrence of TLSs and by etching techniques to avoid substrate-vacuum interfaces in regions of high electric fields (Bruno et al., 2015; Calusine et al., 2018; Megrant et al., 2012; Vissers et al., 2010).”
- Quantum information processing and quantum optics with circuit quantum electrodynamics (2020, background): “Importantly, the lifetime of single microwave photons in these structures can be long, approaching 0.1 ms in coplanar resonators 13–16 and 1 ms in 3D cavities of the type illustrated in Fig.”