Direct Evidence of GeO Volatilization from GeO2/Ge and Impact of Its Suppression on GeO2/Ge Metal–Insulator–Semiconductor Characteristics

By K. Kita, Sho W. Suzuki, Hideyuki Nomura, Toshitake Takahashi, T. Nishimura, A. Toriumi. 2008

171 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/e69dcc5bc88e9b662821ff33fe0fc9d4c0aa22ee