Three-Dimensional Integration Technology Based on Wafer Bonding With Vertical Buried Interconnections

By M. Koyanagi, Tomonori Nakamura, Yuusuke Yamada, H. Kikuchi, T. Fukushima, Tetsu Tanaka, H. Kurino. IEEE Transactions on Electron Devices, 2006

216 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/e54c5866e2501013e2de633e92a0e4bb704235fb