Low dielectric constant materials for microelectronics

By K. Maex, M. Baklanov, D. Shamiryan, F. lacopi, S. Brongersma, Z. Yanovitskaya. 2003

1,506 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/e51366c298adb396f211c1d6a4339c07c280eaff