Influence of Si on the microstructure of arc evaporated (Ti,Si)N thin films; evidence for cubic solid solutions and their thermal stability

By A. Flink, T. Larsson, J. Sjoelen, L. Karlsson, L. Hultman. 2005

135 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/e4e5294e4b94a6f6c73f56c49fe6d61ce3c3f2ce