Influence of DC magnetron sputtering parameters on the properties of amorphous indium zinc oxide thin film

By Yousung Jung, Jiwon Seo, Dong Wook Lee, D. Jeon. 2003

208 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/e46fef05fa60bbd4c453d0d8568f20b0cbb339e6