Island growth as a growth mode in atomic layer deposition: A phenomenological model

By Riikka L. Puurunen, W. Vandervorst. 2004

316 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/e384d5afc5208a9de7516a0bc31b710b41af5af5