Nanoelectromechanical Systems
By Robert Baptist, L. Duraffourg, J. Arcamone. 2000
871 citations recorded by the source corpus.
Nanoelectromechanical systems, or NEMS, are MEMS scaled to submicron dimensions [1]. In this size regime, it is possible to attain extremely high fundamental frequencies while simultaneously preserving very high mechanical responsivity (small force constants). This powerful combination of attributes translates directly into high force sensitivity, operability at ultralow power, and the ability to induce usable nonlinearity with quite modest control forces. In this overview I shall provide an introduction to NEMS and will outline several of their exciting initial applications. However, a stiff entry fee exists at the threshold to this new domain: new engineering is crucial to realizing the full potential of NEMS. Certain mainstays in the methodology of MEMS will, simply, not scale usefully into the regime of NEMS. The most problematic of issues are the size of the devices compared to their embedding circuitry, their extreme surface-to-volume ratios, and their unconventional “characteristic range of operation”. These give rise to some of the principal current challenges in developing NEMS. Most prominent among these are the need for: ultrasensitive, very high bandwidth displacement transducers; an unprecedented control of surface quality and adsorbates; novel modes of efficient actuation at the nanoscale, and precise, robust, and routinely reproducible new approaches to surface and bulk nanomachining. In what follows I shall attempt to survey each of these aspects in turn, but will conclude by describing some exciting prospects in this new field.
Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/e30ada6e37665623d9c492b8a1866395ba854617
How researchers see this paper
The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.
In Atomic and Molecular Physics, and Optics
- Harold S. Park
- Patrick A. Klein
- Herre S. J. van der Zant
- Francisco Guinea
- Gianluca Piazza
- A. Grushin
- Menno Poot
- Philip Stephanou
In Electrical and Electronic Engineering
- Gianluca Piazza
- Philip Stephanou
- Hector Ochoa
- Menno Poot
- Werayut Srituravanich
- Harold S. Park
- Patrick A. Klein
- Francisco Guinea
Citations in the corpus
- Surface stress effects on the resonant properties of metal nanowires: The importance of finite deformation kinematics and the impact of the residual surface stress (2008, methodology): “Because many of the proposed applications for nanowire-based NEMS, such as resonant mass sensing and high frequency oscillators [15–17] rely on the ability to control and tailor the nanowire resonant frequencies with a high degree of precision, it is critical to be able to predict and control variat”
- Mechanical systems in the quantum regime (2011, background): “What limits dissipation and what is the role of microscopic defect such as two-level fluctuators [16,71,72]? Furthermore, for low-mass resonators new effects may start to play a role such as the influence of adsorbents on the resonator surface and nonlinear damping terms associated with the induced ”
- Casimir Forces and Quantum Electrodynamical Torques: Physics and Nanomechanics (2007, neutral): “tions [1]–[4].”
- Review on Micro- and Nanolithography Techniques and Their Applications (2012, background): “In the future, the advance in nanolithography technology will shift current electronics and micro systems into a new paradigm of nanoelectronics and nanoelectromechanical systems [79, 80] opening up a broad range of applications in various disciplines including ICs, magnetic storage, display, and”