Distinctly different thermal decomposition pathways of ultrathin oxide layer on Ge and Si surfaces

By K. Prabhakaran, F. Maeda, Y. Watanabe, T. Ogino. 2000

244 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/e22750f5853f6f40816f5fef7ebed856a80b453a