Experiment and simulation of the compositional evolution of Ti–B thin films deposited by sputtering of a compound target

By J. Neidhardt, S. Mráz, J. Schneider, E. Strub, W. Bohne, B. Liedke, W. Möller, C. Mitterer. 2008

157 citations recorded by the source corpus.

Subfields: Computational Mechanics, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/e17f465baa283fea4fd827583699b37f071689ce