Handbook of Thin Film Deposition

By K. Seshan, D. Schepis. 2002

213 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/e0b72da9ecdf96b2a42ba98d058310a372288c71

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Citations in the corpus

• Nanomaterials and nanoparticles: Sources and toxicity (2007, background): “and hard coatings on eyeglasses. Thin films have been developed and used for decades in various fields, such as electronics, chemistry, and engineering. Thin films can be deposited by various methods [63] and can be grown controllably to be only one atom thick, a so-called monolayer. 2D nanomaterial”
• Axion and hidden photon dark matter detection with multilayer optical haloscopes (2018, background): “1 − 10μm, possible production processes include chemical vapor deposition (CVD), physical vapor deposition (PVD), spin coating, epitaxy, and sputtering (for a review, see [71]).”