Virtual Metrology White Paper - INTERNATIONAL ROADMAP FOR DEVICES AND SYSTEMS(IRDS)
By N. Orji, Y. Obeng, C. Beitia, Supika Mashiro, James R. Moyne. 2018
157 citations recorded by the source corpus.
View Paper: https://www.semanticscholar.org/paper/dd4f71826731134763f1642eecb6a2b0ad9c3450