Elucidation of the layer exchange mechanism in the formation of polycrystalline silicon by aluminum-induced crystallization

By O. Nast, S. Wenham. 2000

343 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/dcc13ad83a8b812f1e00a47101be4b06e2ce1f23