Ga2O3 thin film for oxygen sensor at high temperature
By M. Ogita, K. Higo, Y. Nakanishi, Y. Hatanaka. 2001
257 citations recorded by the source corpus.
Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Materials Chemistry
View Paper: https://www.semanticscholar.org/paper/dcb89024307472e1e024a5c7df464a6365333e22
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In Electrical and Electronic Engineering
In Electronic, Optical and Magnetic Materials
In Materials Chemistry
Citations in the corpus
- Investigation of the oxygen gas sensing performance of Ga2O3 thin films with different dopants (2003, background): “Pure Ga2O3 thin films have strong sensitivity to oxygen gas at operating temperatures above 700 8C [5,6].”
- Metal Oxide Nanomaterials for Chemical Sensors (2013, methodology): “on epitaxial thin films grown on SrTiO3 or LaAlO3 substrates [22, 23].”