Energy harvesting MEMS device based on thin film piezoelectric cantilevers

By Wonjae Choi, Y. Jeon, J. Jeong, R. Sood, Sang-Gook Kim. 2006

363 citations recorded by the source corpus.

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Ultra-Low Resonant Piezoelectric MEMS Energy Harvester With High Power Density (2017, neutral): “(2006) [28] and Yoon et al.”
Chemical Solution Deposition of Functional Oxide Thin Films (2013, neutral): “More severe chemical cleanings with chromic acid [99, 103, 105, 107, 108] or SPM-APM (Fig.”
Piezoelectric Energy Harvesting Devices: An Alternative Energy Source for Wireless Sensors (2012, neutral): “01 μW [69]”
Comparison of MEMS PZT Cantilevers Based on $d_{31}$ and $d_{33}$ Modes for Vibration Energy Harvesting (2013, background): “output power of a d33 mode PEH, but its power is typically lower than that of d31 mode PEHs [10], [11].”
A review on energy harvesting approaches for renewable energies from ambient vibrations and acoustic waves using piezoelectricity (2017, background): “Choi et al [55] A cantilevered beam/plate device designed to resonate at a specific frequency of vibration.”
A Review on Piezoelectric Energy Harvesting: Materials, Methods, and Circuits (2017, methodology): “Successful integration of functional oxides on Si substrate has been reported in literature (Chopra et al. 2013, Chopra, Alexe, and Hesse 2015a; Gardeniers, Smith, and Cobianu 1995).”