Modeling and verifying non-linearities in heterodyne displacement interferometry

By S. Cosijns, H Han Haitjema, P. Schellekens. 2002

144 citations recorded by the source corpus.

Subfields: Computer Vision and Pattern Recognition, Mechanical Engineering, Statistics and Probability

View Paper: https://www.semanticscholar.org/paper/db2f7fb533edcc68ba8b9a0a0f5705d400d6ef41

How researchers see this paper

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1. Guofeng Zhang
2. Shuming Yang

Citations in the corpus

• A review of interferometry for geometric measurement (2018, background): “Ellis et al [33] discussed the general error model and compensation strategy, and extensive research carried out into modeling and correcting these errors was reported in [34].”