Stochastic heating in single and dual frequency capacitive discharges

By E. Kawamura, M. Lieberman, A. Lichtenberg. 2006

152 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/db00d1ebd0831fc0e42a6531d9ef0a5de24f7d2b