Block Copolymer Lithography

By Christopher M. Bates, Michael J. Maher, Dustin W. Janes, Christopher J. Ellison, C. Willson. 2014

572 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/da9117cfabbdf81d1b1249ce3ab519cd16ce5c99