Nanoelectromechanical systems

By Miles P. Blencowe. 2005

981 citations recorded by the source corpus.

Nanoelectromechanical systems (NEMS) are nano-to-micrometer scale mechanical resonators coupled to electronic devices of similar dimensions. NEMS show promise for fast, ultrasensitive force microscopy and for deepening our understanding of how classical dynamics arises by approximation to quantum dynamics. This article begins with a survey of NEMS and then describes certain aspects of their classical dynamics. In particular, we show that for weak coupling the action of the electronic device on the mechanical resonator can be effectively that of a thermal bath, this despite the device being a driven, far-from-equilibrium system.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/da1fe0f14fbf278f3aadc3aae426c8c817ca7032

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In Atomic and Molecular Physics, and Optics

In Electrical and Electronic Engineering

Citations in the corpus

Review on Micro- and Nanolithography Techniques and Their Applications (2012, background): “In the future, the advance in nanolithography technology will shift current electronics and micro systems into a new paradigm of nanoelectronics and nanoelectromechanical systems [79, 80] opening up a broad range of applications in various disciplines including ICs, magnetic storage, display, and”
Second strain gradient elasticity of nano-objects (2016, background): “…behaviour of second strain gradient nano-films The size-dependent tensile behaviour of nano-objects, especially nano-wires, has been widely investigated due to their key role in nano-electromechanical systems (NEMS) (Thomas et al., 2011; Craighead, 2000; Feng et al., 2007; Sanii and Ashby, 2010).”
Mass transport and surface reactions in microfluidic systems (2006, background): “Laminar flow transport models are needed to describe systems with channel widths approaching a few micrometers as in recent lab-on-a-chip systems (Craighead, 2000).”
Memory effects in complex materials and nanoscale systems (2010, background): “a variation in its structural shape as in nano-electromechanical systems [20]).”
Surface stress effects on the resonant properties of metal nanowires: The importance of finite deformation kinematics and the impact of the residual surface stress (2008, neutral): “The finite deformation formulation utilized for the SCB model also enables the calculation of resonant frequencies of highly deformed nanostructures, which may be useful due to the large elastic deformations that nanowires can undergo prior to yield and subsequent failure and due to the numerous sen”