Plasma physics and radiation hydrodynamics in developing an extreme ultraviolet light source for lithographya)

By Katsunobu Nishihara, A. Sunahara, A. Sasaki, M. Nunami, H. Tanuma, S. Fujioka, Y. Shimada, K. Fujima, H. Furukawa, T. Kato and 12 more. 2008

140 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Mechanics of Materials, Nuclear and High Energy Physics

View Paper: https://www.semanticscholar.org/paper/d9c5bdcb0c8b44db59d9f533a9665adf875bef44