Modified Thornton model for magnetron sputtered zinc oxide: film structure and etching behaviour

By O. Kluth, Gunnar Schöpe, J. Hüpkes, C. Agashe, J. Müller, B. Rech. 2003

349 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/d9a3ca27cf168eedd394376058a3a6bcfd465ed4