Springer Handbook of Electronic and Photonic Materials

By R. Wesche. 2017

391 citations recorded by the source corpus.

ion SiH3 + SiH4 SiH4 + SiH3 H + SiH4 H2 + SiH3

Subfields: Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/d901c4ef61992d436fa008c9312f94af698eae90