Mechanical Testing of Thin Films and Small Structures

By Oliver Kraft, C. Volkert. 2001

151 citations recorded by the source corpus.

Subfields: Computational Mechanics, Mechanical Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/d8a285cc66608b141bad2da6567dc18d4b165795

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Mechanics of Materials

1. S. Spearing
2. V. T. Srikar

Citations in the corpus

• A critical review of microscale mechanical testing methods used in the design of microelectromechanical systems (2003, background): “51 It is clear from eqs (5)-( 7 ) that accurate measurement of the gap size and beam thickness is critical for the success of this technique.”