Dopant profiling with the scanning electron microscope—A study of Si

By S. L. Elliott, R. Broom, Colin J. Humphreys. 2002

138 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/d8273d011e32e3db68c4728c4e40eaf5fd528233