Growth of single crystal ZnO nanowires using sputter deposition

By Wen-ting Chiou, Wan‐Yu Wu, J. Ting. 2003

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A theoritical study on spin coating technique (2013, methodology): “…deposition (MOCVD) (Yuan and Zhang 2004), molecular beam epitaxy (MBE) (Heo et al. 2002), pulsed laser deposition (Hong et al. 2009), sputtering (Chiou et al. 2003), flux methods (Xu et al. 2002), eletrospinning (Lin et al. 2007, Sui et al. 2005), spin coating and even top-down approaches by…”
One-dimensional ZnO nanostructures: Solution growth and functional properties (2011, methodology): “One-dimensional (1D) ZnO nanostructures have been synthesized by a wide range of techniques, such as wet chemical methods [28–30], physical vapor deposition [31–33], metal–organic chemical vapor deposition (MOCVD) [34–36], molecular beam epitaxy (MBE) [37], pulsed laser deposition [38, 39], sputteri”
Characterization of ZnO Nanobelt-Based Gas Sensor for ${\rm H}_{2}$, ${\rm NO}_{2}$, and Hydrocarbon Sensing (2007, background): “ganic vapor phase epitaxy [30], electrochemical deposition [19], thermal evaporation [23], [31], and sputtering [32].”