Influence of high power impulse magnetron sputtering plasma ionization on the microstructure of TiN thin films

By A. Ehiasarian, A. Vetushka, Y. A. Gonzalvo, G. Sáfrán, L. Székely, P. Barna. 2011

135 citations recorded by the source corpus.

Subfields: Condensed Matter Physics, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/d6a97c06eb8a3c4635b2abf6bd28dcbc239aad33