Ultrahigh Capacitance Density for Multiple ALD-Grown MIM Capacitor Stacks in 3-D Silicon
By J. Klootwijk, K. Jinesh, W. Dekkers, J. Verhoeven, F. Heuvel, H. Kim, D. Blin, Marcel A. Verheijen, R. Weemaes, Monja Kaiser and 2 more. IEEE Electron Device Letters, 2008
148 citations recorded by the source corpus.
Subfields: Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/d6519aa31c2eb5f34df87a9157b91205abffbede
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In Electrical and Electronic Engineering
Citations in the corpus
- Survey and Benchmark of Fully Integrated Switching Power Converters: Switched-Capacitor Versus Inductive Approach (2013, background): “4) With the use of trench capacitors, capacitive density can be higher than 400 nF/mm2 [24], which is far beyond the other technologies.”