Research development of silicon MEMS gyroscopes: a review

By Zhanshe Guo, Fucheng Cheng, Li Boyu, Cao Le, Lu Chao, Song Ke. 2015

136 citations recorded by the source corpus.

Subfields: Aerospace Engineering, Electrical and Electronic Engineering, Ocean Engineering

View Paper: https://www.semanticscholar.org/paper/d60cd7b795e9f4b9442cbb939b6f625bcef13e68