Electrical and Optical Properties of Fluorine Doped Tin Oxide Thin Films Prepared by Magnetron Sputtering

By Ziad Y. Banyamin, P. Kelly, G. West, J. Boardman. 2014

259 citations recorded by the source corpus.

Fluorine doped tin oxide (FTO) coatings have been prepared using the mid-frequency pulsed DC closed field unbalanced magnetron sputtering technique in an Ar/O2 atmosphere using blends of tin oxide and tin fluoride powder formed into targets. FTO coatings were deposited with a thickness of 400 nm on glass substrates. No post-deposition annealing treatments were carried out. The effects of the chemical composition on the structural (phase, grain size), optical (transmission, optical band-gap) and electrical (resistivity, charge carrier, mobility) properties of the thin films were investigated. Depositing FTO by magnetron sputtering is an environmentally friendly technique and the use of loosely packed blended powder targets gives an efficient means of screening candidate compositions, which also provides a low cost operation. The best film characteristics were achieved using a mass ratio of 12% SnF2 to 88% SnO2 in the target. The thin film produced was polycrystalline with a tetragonal crystal structure. The optimized conditions resulted in a thin film with average visible transmittance of 83% and optical band-gap of 3.80 eV, resistivity of 6.71 × 10−3 Ω·cm, a carrier concentration (Nd) of 1.46 × 1020 cm−3 and a mobility of 15 cm2/Vs.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/d5dbb315a32e51739bef427b299cf68636af3e1a

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Electrical and Electronic Engineering

1. Soojin Park
2. David Hui
3. Kyong Yop Rhee
4. S. Naghdi

In Electronic, Optical and Magnetic Materials

1. Soojin Park
2. Kyong Yop Rhee

In Materials Chemistry

1. David Hui
2. Soojin Park
3. Kyong Yop Rhee

Citations in the corpus

• A Review of Conductive Metal Nanomaterials as Conductive, Transparent, and Flexible Coatings, Thin Films, and Conductive Fillers: Different Deposition Methods and Applications (2018, background): “Ag NWs are considered to be a promising candidate for use in highly conductive, transparent, and flexible electronics and could even replace ITO [8,9].”