Progress in the development and understanding of advanced low k and ultralow k dielectrics for very large-scale integrated interconnects—State of the art

By A. Grill, S. Gates, T. Ryan, S. Nguyen, Deepika Priyadarshini. 2014

250 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/d5ce92e61d3c5472834d643e0864c256d5e68682