Fabrication techniques and materials commonly used for the production of microreactors and micro total analytical systems

By T. Mccreedy. 2000

141 citations recorded by the source corpus.

Subfields: Biomedical Engineering

View Paper: https://www.semanticscholar.org/paper/d577df9440914e5f12aa699491f5180035414a92

Citations in the corpus

• Microfluidics meets MEMS (2003, unknown): “The etchants used in glass microfabrication may vary in composition [52], [53], with mixtures of HF and HNO [54], NH F-buffered HF [55], or concentrated [56] or dilute HF baths being used.”